Nano and Micro-Electro-Mechanical (N/MEMS) Devices

Open lecture entitled “Nano and Micro-Electro-Mechanical (N/MEMS) Devices” held by Prof. Mustafa Yavuz, Director of Nano and Micro-Systems Laboratory, Waterloo Institute for Nanotechnology, University of Waterloo, Canada. The talk was particularly focused on the fabrication, packaging and testing of nano-electro-mechanical systems devices with low contact resistance. A brief introduction on graphene-based transistor and current research conducted at Prof. Yavuz’s lab followed.


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